Standard mirror mounting deformation analysis of large diameter optical interference measurement system

Abstract

The finite element analysis method is mainly used to analyze the displacement and deformation of the lens under the action of gravity. The lens with a diameter of 320 mm and a thickness of 80 mm is used for simulation analysis. The simulation was carried out using the ring-belt support, the groove support, and the T-bracing, and the final deformation data was simulated and compared. The amount of deformation of the ring-shaped structural support was the deformation of the support of the groove structure, and the T-shaped support structure. Deformation. In addition, simulations were performed on various sizes of various support structures. It was found that the effect of changes in dimensions and structure on the final deformation was significant. By changing the diameter and thickness of the lens, the changing trend of the deformation of the lens under different thicknesses and diameters is obtained. The analytical method was used to calculate the deformation and compared with the numerical simulation method. The simulation structure was similar to the analytical results, and the accuracy of the simulation results was verified. In the end, we obtained the minimum deformation of the belt support, and simulate the three-dimensional deformation of the bottom surface. According to the requirements in the actual project, we designed the most appropriate clamping method for the interferometer.