Process and device simulation at Harris Semiconductor

Abstract

The state of the art in the field of process and device simulation at Harris Semiconductor, universities, and vendors is reviewed. Particular emphasis is on interrelationships between these groups and between the supporters of the simulation tools at Harris and Harris process/device designers. Simulation of one of the advanced processes is discussed in detail to show how important simulation has become to process development and to illustrate many of the points discussed. Availability of the source code to the companies has allowed Harris programmers to make several incremental improvements at user's request in the time needed. Some of these enhancements are also discussed.<>