Process Control by Means of Accelerated Testing

Joseph E. Brodeur
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引用次数: 1

Abstract

High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
加速试验方法的过程控制
高温工作寿命测试提供了半导体晶圆制造过程的快速反馈。在这样的测试中,相对较高的故障率(所谓的)畸形很快就会被证明,并且可以表明一个边缘或失控的过程。这种过程控制方法集中于初始沉降,作为确定最终产品可靠性的一种手段。大于150°C的应力温度不应应用于塑料封装的设备。由于大多数环氧树脂的玻璃化转变温度在150°C到180°C之间,可能会对封装造成永久性损坏。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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