Effect of N doping on the Optical and Electrical properties of Thermal Spray pyrolysed ZnO Thin Films

Md. Rahimuddin, Md. Mizanur Rahman, Md. Shoriful Islam, M. A. Sattar, M. A. Halim, M. Haque, Md. Nazrul Islam Khan, Mst. Samia Tabassum
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引用次数: 1

Abstract

Nitrogen doped ZnO (ZnO:N), thin films have been deposited on glass substrate at the temperature of 350ºC by low cost homemade thermal spray pyrolysis (TSP) technique at a normal environmental conditions. In this study the average reflectance, transmittance and absorbance were measured (20%), (35%), and (45%), respectively. Absorption coefficient is 3.5x104cm-1 for N doped ZnO. Direct bandgap energy varies from 3.08-2.99eV and indirect band gap energy varies from 2.86-2.67eV for N doped ZnO. XRD analysis shows the (002) plane is present of samples and the average grain size decrease with increasing N concentration. Surface morphology of N doped ZnO films is studied by Scanning Electron Microscopy (SEM). It is seen that hexagonal crystal grains few voids are present for N doped ZnO samples. The surface exhibits more or less uniform surface morphology with some clusters on the whole surface. Hall Effect study confirms that Nitrogen doped ZnO (ZnO:N), thin films using Vander pauws method were made at room temperature at a constant field of 9.75 KG. Experimentally (1, 2, 3, and 4) % N doped ZnO thin films have shown in negative Hall Constant (RH). Which exhibited n-type characteristics. Hall Constant (RH), and Hall concentration (n), increases with increasing N doping concentration. Initially Hall mobility (μH), increases linearly for (1-2) % N doping concentration then it decreases for the rest of the doping concentration. We also found that the resistivity (ρ) decreases and the conductivity (s) increases with increasing N doping concentration which exhibits the semiconducting nature.
N掺杂对热喷涂热解ZnO薄膜光电性能的影响
采用自制的低成本热喷雾热解(TSP)技术,在350℃的常温条件下,在玻璃基板上制备了氮掺杂ZnO (ZnO:N)薄膜。在本研究中,分别测量了平均反射率(20%)、透射率(35%)和吸光度(45%)。N掺杂ZnO的吸收系数为3.5x104cm-1。N掺杂ZnO的直接带隙能在3.08 ~ 2.99 ev之间,间接带隙能在2.86 ~ 2.67 ev之间。XRD分析表明,随着氮浓度的增加,样品呈(002)平面,平均晶粒尺寸减小。用扫描电子显微镜研究了N掺杂ZnO薄膜的表面形貌。结果表明,N掺杂ZnO样品中出现了六方晶粒,且空洞较少。表面表现出或多或少均匀的表面形貌,整个表面上有一些团簇。霍尔效应研究证实了在室温下9.75 KG恒定场强下,采用Vander pauws法制备了氮掺杂ZnO (ZnO:N)薄膜。实验结果表明(1、2、3、4)% N掺杂ZnO薄膜呈现负霍尔常数(RH)。表现出n型特征。霍尔常数(RH)和霍尔浓度(n)随n掺杂浓度的增加而增加。当掺杂浓度为(1 ~ 2)% N时,霍尔迁移率(μH)呈线性增加,其余浓度随掺杂浓度的增加而减小。我们还发现,随着N掺杂浓度的增加,电阻率(ρ)降低,电导率(s)增加,表现出半导体性质。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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