The Need and Opportunities of Electromigration-Aware Integrated Circuit Design

Steve Bigalke, J. Lienig, Göran Jerke, J. Scheible, R. Jancke
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引用次数: 10

Abstract

Electromigration (EM) is becoming a progressively severe reliability challenge due to increased interconnect current densities. A shift from traditional (post-layout) EM verification to robust (pro-active) EM-aware design - where the circuit layout is designed with individual EM-robust solutions - is urgently needed. This tutorial will give an overview of EM and its effects on the reliability of present and future integrated circuits (ICs). We introduce the physical EM process and present its specific characteristics that can be affected during physical design. Examples of EM countermeasures which are applied in today's commercial design flows are presented. We show how to improve the EM-robustness of metallization patterns and we also consider mission profiles to obtain application-oriented current-density limits. The increasing interaction of EM with thermal migration is investigated as well. We conclude with a discussion of application examples to shift from the current post-layout EM verification towards an EM-aware physical design process. Its methodologies, such as EM-aware routing, increase the EM-robustness of the layout with the overall goal of reducing the negative impact of EM on the circuit's reliability.
电迁移感知集成电路设计的需要与机遇
由于互连电流密度的增加,电迁移(EM)正逐渐成为一个严峻的可靠性挑战。目前迫切需要从传统的(布局后)电磁验证转向稳健的(主动的)电磁感知设计,即采用单独的电磁稳健解决方案设计电路布局。本教程将概述电磁及其对当前和未来集成电路可靠性的影响。我们介绍了物理电磁过程,并介绍了其在物理设计过程中可能受到影响的具体特性。介绍了在当今商业设计流程中应用的电磁对抗措施的实例。我们展示了如何提高金属化模式的em鲁棒性,我们还考虑了任务剖面以获得面向应用的电流密度限制。研究了电磁与热迁移之间日益增强的相互作用。最后,我们讨论了应用实例,从当前的布局后EM验证转向EM感知的物理设计过程。它的方法,如电磁感知路由,增加了布局的电磁鲁棒性,总体目标是减少电磁对电路可靠性的负面影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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