Determination of the molecular vacuum pump stage main parameters by the Monte-Carlo method

Abstract

The problem of determining the conductivity of the channel formed by the wheel blades of a molecular vacuum pump is set within the framework of the study of the gas flow along curved structures, determine the conductivity of the channel, as well as the main pumping parameters of the wheel itself: the maximum speed of Smax and the maximum pressure ratio τmax, the probability of k1 "direct" transition of molecules from the suction side to the discharge side, and then the probability k2 "reverse" transition. Based on the results of this work, a program for determining the probabilities k1 and k2 was developed. The result is a graph of the dependence of the main pumping parameters of the wheel (Smax and τmax) on a number of parameters.