Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode

Abstract

This paper describes the operation principle and design of a CMOS compatible and high temperature capable AIN-based piezoelectric resonant uncooled infrared detector. The A1N piezoelectric resonator is designed to operate at hundreds megahertz frequencies in Lamb wave mode or contour extensional. The design parameters include IDT electrode fingers and A1N piezoelectric film dimension. The performance of different structure designs of the A1N resonator are compared in ANSYS and COMSOL simulation tool.