Research on a novel synchronous permanent magnet planar motor with concentric winding for lithography

Abstract

A novel synchronous permanent magnet planar motor (SPMPM) which with concentric structure winding is investigated in this paper. Topology of this SPMPM is introduced, and as the mover can move freely on the stator, the planar motor is suitable for long-stroke applications in the lithography. Flux density, electromagnetic thrust and back-EMF of the SPMPM are obtained analytically and compared with the finite element simulation results. A prototype is manufactured and tested successfully. The measured values matching the simulated ones well.