3D Printed Biaxial Scanning Micromirror for Biomedical Applications

Abstract

This paper presents a new type of biaxial scanning micromirror fabricated with 3D printing technology. The fabricated device is electromagnetically actuated with external coils and moving magnets embedded in the structural layer of the device. With the fabricated device, the maximum optical scan angle of 11 degrees and 10.3 degrees have been obtained for vertical and horizontal scan modes, respectively. Proposed scanning micromirror design and fabrication approach using 3D printing can be utilized in various applications, including biomedical imaging systems with further device optimization.