Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering

Abstract

In this work, we present a newly titanium-contained periodic amorphous carbon(a-C) composite films by magnetron sputtering process on silicon (100) substrate which has lower intrinsic compressive stress that can be used in electrical modulation pulsed MEMS infrared(IR) source for NDIR gas sensors. The fabrication process, results, performance and results analysis are then carried out.