Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope

Abstract

The paper describes a small size (2.25 mm2active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 °/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (°/hr)/g, bias repeatability of 50 °/hr in 10 years, and no observable startup drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.