Nanosphere lithography for improved absorption in thin crystalline silicon solar cells

Yuan-Chih Chang, D. Payne, M. Pollard, S. Pillai, D. Bagnall
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引用次数: 2

Abstract

Over the last decade, plasmonic nanoparticle arrays have been extensively studied for their light trapping potential in thin film solar cells. However, the commercial use of such arrays has been limited by complex and expensive fabrication techniques such as e-beam lithography. Nanosphere lithography (NSL) is a promising low-cost alternative for forming regular arrays of nanoscale features. Here, we use finite-difference time-domain (FDTD) simulations to determine the optical enhancement due to nanosphere arrays embedded at the rear of a complete thin film device. Array parameters including the nanosphere pitch and diameter are explored, with the FDTD model itself first validated by comparing simulations of Ag nanodisc arrays with optical measurements of pre-existing e-beam fabricated test structures. These results are used to guide the development of a nanosphere back-reflector for 20 μm thin crystalline silicon cells. The deposition of polystyrene nanosphere monolayers is optimized to provide uniform arrays, which are subsequently incorporated into preliminary, proof of concept device structures. Absorption and photoluminescence measurements clearly demonstrate the potential of nanosphere arrays for improving the optical response of a solar cell using economical and scalable methods.
改善薄晶硅太阳能电池吸收的纳米球光刻技术
在过去的十年中,等离子体纳米粒子阵列因其在薄膜太阳能电池中的光捕获潜力而得到了广泛的研究。然而,这种阵列的商业用途受到复杂和昂贵的制造技术(如电子束光刻)的限制。纳米球光刻(NSL)是一种很有前途的低成本替代方法,可用于形成纳米尺度特征的规则阵列。在这里,我们使用时域有限差分(FDTD)模拟来确定由于嵌入在完整薄膜器件后部的纳米球阵列所导致的光学增强。研究了包括纳米球间距和直径在内的阵列参数,FDTD模型本身首先通过将银纳米盘阵列的模拟与已有电子束制造测试结构的光学测量进行比较来验证。这些结果可用于指导20 μm薄晶硅电池纳米球背反射器的研制。聚苯乙烯纳米球单层的沉积经过优化,可以提供均匀的阵列,随后将其纳入初步的概念验证器件结构中。吸收和光致发光测量清楚地表明,纳米球阵列具有改善太阳能电池光学响应的潜力,使用经济和可扩展的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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