Spurious wave suppression in BAW resonators with frame-like airgap

Abstract

In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.