Investigation on Fabrication-induced High-leakage Issue of an Overdrive ESD Power Clamp in Advanced FinFET Technology

Abstract

Fabrication-induced high-leakage issue of an overdrive ESD power clamp is presented. With silicon data exhibiting abnormal results, elaborate troubleshooting is performed and disclosed in this paper. Through alignments of silicon data and presumptive simulation results, fabrication-induced root cause is successfully revealed and confirmed by physical failure analysis (PFA) results.