Research on process of optical elements coating planar layer

Abstract

In order to solve the problems of no uniform coating, edge coating, and severe coating defects in the process when processing 430mm×430mm optical components, The basic requirements of surface roughness data acquisition are analyzed and the application of inductive sensor in surface roughness is introduced. Optical element flattening layer coating and flow direction mechanisms, flattening layer material selection, and research on material characteristics and optical element planarization layer deposition process, achieving uniform coating of optical elements, reducing coating defects, and meeting the requirements of the next process polishing