Stick-slip based micropositioning stage for transmission electron microscope

Abstract

This paper presents work that has been done on design of a micropositioning stage for a transmission electron microscope. Topics covered include mechanical design of the positioning stage, sawtooth-like high voltage generator, report on experimental identification of the system, some thoughts and experience with input command shaping, finite-element analysis and design of capacitive 2-axis position sensor and design of signal processing circuitry for this sensor