RF/microwave Sensed Cantilevers, Diaphragms, and Tactile Sensors for Passive and Active Sensor Systems

Abstract

Sensors and sensor systems for in-vivo implantation present several challenges. These include power requirements and compatibility with low voltage integrated circuit technology at the one to three volt level. This paper in addition to discussing several sensing structures, discusses a cantilever structure that has demonstrated low pull in voltages and for which the pull in voltage is easily designed. Passive sensing structures need to be remotely sensed. Active structures need power supplies. Some considerations are given for some power supply systems