An approach with electrostatic MEMS switch for environment energy harvesting

Abstract

A new approach is developed for environment energy harvesting based on an electrostatic MEMS switch due to its hysteresis property. A hysteresis model of the electrostatic MEMS switch is established, and theoretical and experimental results show that the hysteresis window is designable. A demo for piezoelectric energy harvesting based on the MEMS switch is designed and finished. The approach is compacted, passive and efficient, which facilitates the development of energy harvesting.