A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F

Abstract

This paper presents a novel spring disk resonator gyroscope (SRG). The SRG consists of coupled concentric serpentine spring-like rings to reduce mode stiffness while maintaining a device footprint the same as that of existing standard DRGs: 600um in diameter. The $Q$ is increased by a factor of 2.5, and the ring down-time of 934ms is 4 times longer than that of a standard DRG.