Patterning of Pt/RuO2 electrodes for Pb(Zr,Ti)O3 in an Inductively Coupled Cl2/O2 Plasma

27th European Solid-State Device Research Conference Pub Date : 1997-09-22 DOI:10.1109/ESSDERC.1997.194537

S. Park, J. Lee, H. Jung, M. Jeon, D. Choi

引用次数: 0

Abstract

Inductively coupled plasma excited by a helical antenna is used to pattern Pt/RuOz electrodes for PZT. The hybrid electrode of thin Pt on thicker RuOz layer has been studied because of good leakage current characteristics of Pt and easy etch characteristics of RuOz. The etch rates and selectivities to oxide hard mask have been measured for each of Pt and RuOz in terms of

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电感耦合Cl2/O2等离子体中Pb(Zr,Ti)O3的Pt/RuO2电极的图形化

利用螺旋天线激发的电感耦合等离子体对PZT的Pt/RuOz电极进行了图像化。由于Pt具有良好的漏电流特性和RuOz易于蚀刻的特性，研究了薄Pt在厚RuOz层上的杂化电极。以

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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