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Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage

New Technologies, Development and Application IV Pub Date : 2021-06-24 DOI:10.1007/978-3-030-75275-0_3
M. Bondarenko, V. Antonyuk, I. Bondarenko, I. Makarenko, Sergii Vysloukh
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碳包覆改性的原子力显微镜硅探针提高纳米电子元件显微硬度测量的精度
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New Technologies, Development and Application IV
New Technologies, Development and Application IV
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