Applications of induction motors and stepping motors in small scale position control systems

Abstract

A control system that can make an AC motor or stepping motor perform positioning simply was developed. This system can be satisfactorily applied to a positioning system with a minimum increment of 1.8 degrees/pulse, and if an encoder with 10000 pulses/rev is applied, positioning accuracy of even 1 mu m can be possible with the use of a ball screw of 10 mm/rev. On the other hand, in stage position control with the use of a stepping motor, by absolute position control in combination with a light position sensor, a maximum error of within 1.8 mu m can be realized even with a 2 mm/pitch ball screw.<>