Study on mobility of water and polymer chain in epoxy for microelectronic applications

S. Luo, J. Leisen, C. Wong
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引用次数: 12

Abstract

This paper presents a study on mobility of water and polymer chain in epoxy materials. Solid state nuclear magnetic resonance (NMR) techniques (both /sup 1/H NMR and /sup 2/H NMR) were used to study the binding states of water within two epoxy formulations along with the possible plasticizing effects of moisture affecting the mobility of polymer chains. Absorbed water reduces the glass transition temperature of polymeric material. However, the presence of moisture has no significant effect on the polymer chain mobility at temperatures below the reduced glass transition temperature. Water in an epoxy in its rubbery state above the glass transition has a much higher mobility than in a polymer in its glassy state. The mobility of water absorbed by a polymer in its rubbery state is similar to that of pure water. The translational mobility of water within epoxies was studied by measuring the diffusion coefficient of water in epoxies through the water uptake. Higher rotational mobilities of water and polymer chains in the rubbery state lead to a significant increase of the water diffusion coefficient in the rubbery state polymer matrix as compared to a polymer in its glassy state.
微电子用环氧树脂中水和聚合物链的迁移性研究
本文研究了环氧材料中水和聚合物链的迁移性。采用固态核磁共振(NMR)技术(/sup 1/H NMR和/sup 2/H NMR)研究了水在两种环氧树脂配方中的结合状态,以及水分对聚合物链迁移率可能产生的塑化作用。吸收的水分降低了聚合物的玻璃化转变温度。然而,当温度低于降低的玻璃化转变温度时,水分的存在对聚合物链迁移率没有显著影响。在玻璃化转变之上的橡胶态环氧树脂中的水比玻璃态聚合物中的水具有高得多的迁移率。聚合物在其橡胶状态下吸收的水的流动性与纯水相似。通过吸水性测定水在环氧树脂中的扩散系数,研究了水在环氧树脂中的平移迁移率。与玻璃态的聚合物相比,橡胶态的水和聚合物链的旋转迁移率更高,导致橡胶态聚合物基质中的水扩散系数显著增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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