Porosity control in thin film solar cells: Two-dimensional case

Jianqiao Huang, G. Orkoulas, P. Christofides
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Abstract

This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.
薄膜太阳能电池的孔隙度控制:二维情况
本工作的重点是用于薄膜太阳能电池系统制造的多孔硅薄膜沉积过程的模拟和控制。首先,通过动力学蒙特卡罗(kMC)方法在三角晶格上模拟了这一过程。然后引入封闭形式的微分方程模型来预测kMC模型和闭环系统的动力学,并通过拟合开环kMC仿真结果来识别模型参数。最后,设计了一个模型预测控制器(MPC),结果表明膜厚和孔隙率都可以调节到期望的值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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