Boron monophosphide on Si and device applications

K. Shohno, H. Otake
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Abstract

n- or p-type boron monophosphide (BP) with a forbidden energy gap of 2.0 eV was epitaxially grown on Si substrates using a B2H6-PH3-H2system, n-type (phosphorous) or p-type (boron) diffusion layers were also formed in the Si substrates. By combining the conductivity type of the BP, the diffusion layer and the Si substrate, several types of BP-Si junctions were realized. Two examples of applied devices were a wide gap window solar cell (η = 8.3%) and a wide gap emitter transistor (β = 16). The focus of our research projects on BP is the development of III-V compound semiconductor technology along the lines of the Si planar process.
硅上的单磷酸硼及其器件应用
在b2h6 - ph3 - h2_2体系中外延生长禁能隙为2.0 eV的n型或p型单磷化硼(BP),并在Si衬底上形成n型(磷)或p型(硼)扩散层。通过结合BP的导电类型、扩散层和Si衬底,实现了几种BP-Si结。应用器件的两个例子是宽间隙窗口太阳能电池(η = 8.3%)和宽间隙发射极晶体管(β = 16)。我们在BP上的研究项目的重点是沿着Si平面工艺的路线开发III-V化合物半导体技术。
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