Overview of Au-Al Bond Interface

Shuang Xie, P. Lin, Quanbin Yao
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引用次数: 1

Abstract

Wire bonding technology is the main form of interconnection in integrated circuits. It has the advantages of simple process, low cost, and suitable for various packaging forms. In traditional integrated circuits, gold wires are used to achieve electrical interconnection between the chip and the housing for reliability considerations. According to related documents and patents, this literature overviews the research progress of the influence of bonding materials, bonding pad quality and interface compound evolution on the interface bonding strength and reliability, and looks forward to the future development prospects. The article reviews bonding wires and the development direction of bonding alloy wires. The paper summarizes the theory of void growth on the bonding interface, that is kirkendall effect, volume shrinkage and IMC oxidation. The article studies the influence of alloy wires on the quality of the bonding interface, as well as the effects of doping with different components and gold content.
Au-Al键界面概述
线键合技术是集成电路互连的主要形式。它具有工艺简单,成本低,适合各种包装形式的优点。在传统集成电路中,出于可靠性考虑,采用金线实现芯片和外壳之间的电气互连。本文根据相关文献和专利资料,综述了键合材料、键合垫质量和界面化合物演变对界面键合强度和可靠性影响的研究进展,并展望了未来发展前景。本文综述了键合丝及合金键合丝的发展方向。综述了结合界面上孔洞生长的理论,即kirkendall效应、体积收缩和IMC氧化。本文研究了合金丝对结合界面质量的影响,以及不同组分掺杂和含金量的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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