Numerical estimation of dispersion effect in deeply-etched fully integrated MEMS Mach-Zhender interferometer

Abstract

In this paper we numerically investigate the impact of Silicon refractive index dispersion on white source interferometry of deeply etched Mach-Zhender interferometer. The numerical simulations show that the dispersion effect results in a chirped and shifted interferogram. The dispersed interferogram can be compensated by utilizing long travel range electrostatic MEMS actuators.