Linear MEMS micromirror array for UV-NIR femtosecond pulse shaping

2010 International Conference on Optical MEMS and Nanophotonics Pub Date : 2010-12-17 DOI:10.1109/OMEMS.2010.5672184

S. Weber, J. Extermann, W. Noell, F. Jutzi, S. Lani, D. Kiselev, L. Bonacina, N. D. de Rooij, J. Wolf

引用次数: 0

Abstract

We report our progress and the first optical application on the high-aspect ratio micromirror array for UV-NIR femtosecond (fs) broadband pulse shaping [1]. It is a bulk-micromachined device. capable of individually addressing 100 mirrors with a stroke of up to 3 μm using vertical comb drives in a novel. symmetrical double-spring design. The device was successfully implemented in a fs pulse shaper setup at λ0=795 nm.

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用于紫外-近红外飞秒脉冲整形的线性MEMS微镜阵列

我们报告了高纵横比微镜阵列在UV-NIR飞秒(fs)宽带脉冲整形方面的研究进展和首次光学应用[1]。这是一个大型微机械设备。能够单独寻址100面镜子，行程高达3 μm，使用垂直梳状驱动器。对称双弹簧设计。该器件在波长为λ0=795 nm的fs脉冲成形器中成功实现。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2010 International Conference on Optical MEMS and Nanophotonics

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