{"title":"Ultra-thin Film Interferometry To Characterize Epitaxial Layer Interfaces And To Measure Film Thickness","authors":"T. Ogawa, Lu Taijing, K. Toyoda","doi":"10.1109/LEOS.1992.693820","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":331211,"journal":{"name":"LEOS '92 Conference Proceedings","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"LEOS '92 Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOS.1992.693820","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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