T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh
{"title":"Ultrashort laser pulse ablation and spatial distribution of ablation products of NiMoRe target","authors":"T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh","doi":"10.1117/12.464134","DOIUrl":null,"url":null,"abstract":"In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.","PeriodicalId":194489,"journal":{"name":"International Conference on Laser and Laser Information Technologies","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Laser and Laser Information Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.464134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.