Vacuum UV Emission Property of Zn-doped MgO films Grown by Mist Chemical Vapor Deposition Method

Abstract

Rocksalt-structured (RS) Zn-doped MgO films were grown on (100) MgO substrates by the mist chemical vapor deposition method. MgO homoepitaxial film exhibited a near-band-edge (NBE) cathodoluminescence peak at 7.63 eV at 6 K. Zn-doping reduced the MgO NBE emission, and alternatively resulted in observation of NBE at around 7.2 eV as a shoulder. Further increase in Zn precursor source ratio drove observation of predominate NBE emission at 6.3 eV. The results ensure a potential to develop a vacuum UV emitter in 170 nm spectral range.