Effects of Inlet Flow Rates on Purge Durations in an Atomic Layer Deposition Process

Abstract

– The effects of inlet flow rates on the purge durations in an atomic layer deposition (ALD) process are investigated through the simulation of three-dimensional laminar multicomponent flow in viscous flow reactors. The operating pressure and temperature are 10 torr (1333 Pa) and 300 °C, respectively. Purge durations in reactors with inlet located on the top surface of the reactor are compared with those in a base reactor with one inlet at the bottom surface of the reactor. It is found that purge durations are reduced by an increase in the flow rates, but they are independent from the number of inlets if the flow rates are maintained equal among different reactors. One exception is the reactor with one inlet at the center of the top surface of the reactor, which experiences the longest purge durations, most likely due to the axisymmetric gas injection in this reactor. The acquired results will provide a better understanding about designing efficient viscous flow reactors to reduce both purge duration and gas consumption.