Influence of Thermal Treatment of Sol-Gel Derived (Ca0.8Sr0.2)ZrO3 Dielectric Thin Films

Abstract

Effect of thermal treatment on microstructures and electrical properties of the sol-gel derived (Ca0.8Sr0.2)ZrO3 thin films were investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. Scanning electron microscopy results show that the grain size are found to be dependent on the annealing temperature. Based on the surface structure and morphological characteristics, the thin films were sensitive to deposition conditions, such as the preheating temperature and annealing temperature. At a preheating temperature of 400°C and an annealing temperature of 700°C, the (Ca0.8Sr0.2)ZrO3 film observes a dielectric constant of 24 (f = 1 MHz), a dissipation factor of 0.21 (f = 1 MHz), and a leakage current density of 3.8×10−9 A/cm2 at an electrical field of 10 kV/cm.