DIffractive Microlenses With binary focal points on the optical axis

M. Mihailescu, A. Sobetkii, M. Pelteacu
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Abstract

The aim of our study was to find a simple design for diffractive microlenses (DMLs) which will generate two focal points on the propagation axis at plane wave incidence. We investigate the influence of the missing central zones in the diffraction pattern. The fabrication steps include e-beam lithography (for mask pattern) and reactive ion etching (for transparent DMLs). To visualize their transparent binary microrelief and the phase profile, we employ the digital holographic microscopy technique. Experimental and simulation results are presented.
在光轴上有双焦点的衍射微透镜
我们的研究目的是找到一种简单的衍射微透镜(dml)的设计,它将在平面波入射时在传播轴上产生两个焦点。我们研究了衍射图中中心区域缺失的影响。制造步骤包括电子束光刻(用于掩模图案)和反应离子蚀刻(用于透明dml)。为了可视化它们的透明二元微浮雕和相位轮廓,我们采用了数字全息显微镜技术。给出了实验和仿真结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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