Thermocouples on trench sidewall in channel fronting on flowing material

Abstract

In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.