Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes

Abstract

In this contribution we introduce and describe three electronics for MEMS and ASIC testing. With them it is possible to select best working MEMS- and ASIC dies to set up high performance gyroscope systems. We highlight the Active Probecard which makes it possible to operate and characterize MEMS gyroscopes as a provisionally system already at wafer-level. These results are compared with the resulting system-level tests and coherences are shown. The most influencing parameters on noise level are elaborated. Moreover, first results of the new designed DC quadrature compensation electrodes on noise performance are shown which reduce ARW from 0.07 °/√h to 0.02 °/√h and BI from 1.3 °/h to 0.4 °/h.