Intel 22nm Low-Power FinFET (22FFL) Process Technology for 5G and Beyond

Abstract

Intel's 22FFL is the comprehensive FinFET technology offering the best-in-class RF transistors achieving $f_{t}$ and $f_{max}$ above 300GHz and 450GHz, respectively. The addition of a high-power RF device (HyPowerFF) and enhanced mmWave BEOL support the opportunity to push silicon technology beyond the 5G era.