Lanjiao Liu, Zuobin Wang, Z. Weng, Li Li, Jixing Cai, Litong Dong, Zhengxun Song, Hongmei Xu
{"title":"Nanomanipulation of single nanowires on structured surfaces fabricated by laser interference lithography","authors":"Lanjiao Liu, Zuobin Wang, Z. Weng, Li Li, Jixing Cai, Litong Dong, Zhengxun Song, Hongmei Xu","doi":"10.1109/3M-NANO.2016.7824985","DOIUrl":null,"url":null,"abstract":"Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824985","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.