10 GHz narrow band SAW filters using diamond

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) Pub Date : 1999-10-17 DOI:10.1109/ULTSYM.1999.849412

A. Hachigo, H. Nakahata, K. Itakura, Satoshi Fujii, S. Shikata

引用次数: 22

Abstract

Harmonic phenomena for the layered structures have been discussed and show several differences from those for bulk substrates. An equivalent circuit model for the harmonics including velocity dispersion has been presented and compared with experiments. SAW filters up to 10 GHz have been fabricated over one micron line width using the ZnO/diamond structure.

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10 GHz窄带SAW滤波器采用金刚石

对层状结构的谐波现象进行了讨论，并显示出与块状基板的谐波现象的一些不同之处。提出了包含速度色散的谐波等效电路模型，并与实验进行了比较。利用ZnO/金刚石结构制备了线宽超过1微米的10 GHz SAW滤波器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

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