ZnO Nanostructure Deposition on Si Substrates by Chemical Vapor Deposition and its Antibacterial effect on Escherichia coli

Abstract

ZnO nanostructures are directly integrated into a substrate by chemical vapor deposition (CVD) method. Gold catalyst is patterned on a Si substrate using a DC magnetron sputtering and then ZnO nano structures is grown on the patterned substrate by CVD. X-ray diffraction and scanning electron microscopy (SEM) were employed to obtain the nanostructure and morphology of the films. Additionally, the antibacterial effect has been studied on Escherichia coli. The result shows that the bacteriostatic effect was dependent on the ZnO nanostructures thickness.