{"title":"GEOMETRIC MEASUREMENTS USING MICROWAVES","authors":"V. I. Matveev","doi":"10.14489/td.2022.04.pp.048-054","DOIUrl":null,"url":null,"abstract":"The article presents an overview of methods for measuring geometric parameters – the thickness of dielectric materials and products using ultrahigh frequency radio waves. The main methods of thickness measurement are considered: geometric, amplitude-phase, frequency-phase, ellipsometric, with examples and characteristics of their practical application. The schemes of implemented microwave thickness gauges and converters are given.","PeriodicalId":432853,"journal":{"name":"Kontrol'. Diagnostika","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Kontrol'. Diagnostika","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14489/td.2022.04.pp.048-054","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The article presents an overview of methods for measuring geometric parameters – the thickness of dielectric materials and products using ultrahigh frequency radio waves. The main methods of thickness measurement are considered: geometric, amplitude-phase, frequency-phase, ellipsometric, with examples and characteristics of their practical application. The schemes of implemented microwave thickness gauges and converters are given.