Guided-mode resonance device technology: Design, fabrication, applications and prospects

Abstract

We review principles and applications of nanophotonic devices based on the guided-mode resonance effect in thin periodic films. We discuss design and optimization with rigorous mathematical methods and review typical fabrication processes. Theoretical and experimental results for numerous prototype devices are provided. These include wideband reflectors, nonfocusing spatial filters, ultra-sparse reflectors and polarizers, single-layer bandpass filters, and resonant sensors. Inherent modal dynamics allow facile manipulation of resonant amplitudes, phase, polarization, and spectral bandwidth. This enables design of robust devices with minimal layer count. The guided-mode resonance concept applies in all spectral regions, from the visible to the microwave domain, with available low-loss materials.