Vibration modes analysis by X-ray topography in quartz and langasite resonators

J. Mateescu, B. Capelle, J. Détaint, G. Johnson, L. Dumitrache, C. Bran
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Abstract

This paper presents the results of the vibration modes measurements by X-ray topography in SC-cut quartz and Y-cut unpolished langasite resonators. A comparison of these results with X-ray diffraction topography images on AT-cut quartz resonators and Y-cut polished langasite resonators pointed out the behavior of mass-loading effect with plate orientation angle and with the surface state of the piezoelectric substrate. The results are compared with electrical measurements performed on the same resonators. 5 MHz Sawyer, plan parallel SC-cut quartz and Y-cut unpolished langasite resonators, with 14 mm plate diameter and various electrode thickness and diameters have been investigated on fundamental, third and fifth overtones. The study on SC-cut quartz resonators and unpolished Y-cut langasite resonators pointed out a good agreement with the results obtained on the same resonators by electrical measurements. The conclusion is that the SC-cut quartz resonator characteristics present a similarly harmonic dependence with those of the Y-cut langasite resonators thus revealing the stress-compensated feature of the Y-cut in langasite crystal.
石英和langasite谐振腔的x射线形貌振动模式分析
本文介绍了sc型切割石英和y型切割未抛光langasite谐振腔的x射线形貌振动模式测量结果。将这些结果与at切割石英谐振器和y切割抛光langasite谐振器的x射线衍射形貌图进行比较,指出了质量加载效应与板取向角和压电衬底表面状态的关系。结果与在相同谐振器上进行的电测量进行了比较。5 MHz Sawyer,平面平行SC-cut石英和Y-cut未抛光的langasite谐振器,具有14 mm的板直径和不同的电极厚度和直径,对基音,三音和五音进行了研究。对sc切割石英谐振器和y切割未抛光的langasite谐振器进行了研究,结果与电测量结果吻合较好。结果表明,SC-cut石英谐振腔的谐振特性与Y-cut langasite谐振腔的谐振腔具有相似的谐波依赖性,从而揭示了Y-cut在langasite晶体中的应力补偿特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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