Statistical process control and the drive for six sigma in a VLSI pilot line

Abstract

The requirements of semiconductor device manufacturing and defense industry needs are continually demanding tighter process control and reduced levels of defects. Statistical process control (SPC) techniques are required to meet these requirements. The VLSI pilot line has implemented SPC control in manufacturing on all products. Online charts are used to identify and correct problems as quickly as possible and capability indices are used to drive continuous improvement.<>