Advanced Microfabrication Techniques for Millimetre Band Cavities

M. Verdiel, J. Protz
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引用次数: 1

Abstract

microfabrication recipe involving Deep Reactive Ion Etching, Chemical Mechanical Polishing, and Silicon Direct Bonding is proposed as a way to fabricate high precision cavities for millimetre band devices. The effect of fabrication variances on device performance is predicted.
毫米带腔的先进微加工技术
提出了一种涉及深度反应离子蚀刻、化学机械抛光和硅直接键合的微加工配方,用于制造毫米波段器件的高精度腔体。预测了制造差异对器件性能的影响。
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