Thermal conductivity measurements on suspended diamond membranes using picosecond and femtosecond time-domain thermoreflectance

R. Cheaito, A. Sood, Luke Yates, Thomas L. Bougher, Zhe Cheng, M. Asheghi, S. Graham, K. Goodson
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引用次数: 7

Abstract

We report on the room temperature in-plane thermal conductivity measurements on a 1-micrometer thick suspended diamond membrane grown by chemical vapor deposition using two different time domain thermoreflectance (TDTR) setups. The first setup is at Stanford University and the second is at Georgia Institute of Technology. Despite the differences between the two setups and the difficulty associated with diamond membranes thermal measurements, we demonstrate excellent repeatability from each setup and a very good agreement between the two setups. The paper outlines steps considered by both groups to minimize the measurement uncertainty and achieve such agreement. The measurement results show that the thermal conductivity displays a large variability across the membrane. The sensitivity and uncertainty analyses suggest that this variability could be a result of the nonuniformity in the diamond and aluminum coating thicknesses across the sample.
利用皮秒和飞秒时域热反射测量悬浮金刚石膜的热导率
本文报道了用两种不同的时域热反射(TDTR)装置对化学气相沉积法生长的1微米厚悬浮金刚石膜的室温面内导热系数的测量。第一个是在斯坦福大学,第二个是在佐治亚理工学院。尽管两种设置之间存在差异,并且与金刚石膜热测量相关的困难,但我们证明了每种设置的出色重复性以及两种设置之间非常好的一致性。本文概述了两组考虑的步骤,以尽量减少测量不确定度并达到这种一致。测量结果表明,热导率在膜上表现出很大的变异性。灵敏度和不确定性分析表明,这种变化可能是样品中金刚石和铝涂层厚度不均匀的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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