Surface defect detection and classification with light scattering

Other Conferences Pub Date : 1991-10-01 DOI:10.1117/12.46822
M. Gebhardt, H. Truckenbrodt, B. Harnisch
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引用次数: 5

Abstract

The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.
基于光散射的表面缺陷检测与分类
光滑技术表面的质量以表面粗糙度和表面缺陷为特征。为了稳定的质量控制,客观的测量条件是必要的。特别是表面缺陷的客观测量是一个尚未解决的问题。为了研究不同表面缺陷的散射特性,研制了一种测量装置。利用该测量装置测量了缺陷类型和与角度相关的散射强度,并与理论计算结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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