A Novel High Performance Micromechanical Resonant Electrostatic Field Sensor Used In Atmospheric Electric Field Detection

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627895

C. Peng, Xianxiang Chen, Q. Bai, L. Luo, S. Xia

引用次数: 26

Abstract

This paper reports a high performance micromechanical resonant electrostatic field sensor (EFS) that is fabricated with a three-layer polysilicon surface micromachining process. The EFS has a high resolution of 100V/m when used in ambient air at room temperature. The driving voltage is 25V DC and 0.3Vp-p AC lower than other reported electrostatic comb driven devices. Experimental results show that the EFS can be succeeded in atmospheric electric field detecting.

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一种用于大气电场检测的新型高性能微机械谐振静电场传感器

采用三层多晶硅表面微加工工艺制备了一种高性能微机械谐振静电场传感器。在室温环境空气中使用时，EFS具有100V/m的高分辨率。驱动电压为直流25V，交流0.3Vp-p，比其他报道的静电梳子驱动器件低。实验结果表明，该方法可以成功地用于大气电场探测。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

19th IEEE International Conference on Micro Electro Mechanical Systems

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