Design and Fabrication of Electro-Thermal 1-D Micro-Mirror

Abstract

This paper presents design and fabrication of MEMS 1-D micro mirror using thermally actuated bimorph actuator, for out of plane actuation application. Bimorph actuator was made of aluminum and silicon dioxide materials. Micro mirror performance was simulated using COMSOL multiphysics tool. Maximum displacement and temperature profile with voltage along micro mirror were presented. Aluminum was used as heater element as well as top layer of bimorph layer. Micro mirror was successfully released using surface micromachining with copper as sacrificial layer.