An improved probe sharpening technique (microelectronics failure analysis)

Abstract

An electrochemical probe-sharpening technique with useful microelectronics applications is discussed. This technique was originally designed for scanning tunneling microscope tips. Probe tips produced by the technique are both sharp and strong. In addition, the tip radius is easily set by monitoring current flow during the etch, making it possible to automate the procedure. A circuit for this purpose is given.<>